Tungsten Sputtering Target

Tungsten Sputtering Target performance

Sputtering targets are used for magnetron sputtering coating, which is a new type of physical vapor coating (PVD) method.

An orthogonal magnetic field and an electric field are added between the sputtered target (cathode) and the anode, and the required inert gas (usually Ar gas) is filled in the high vacuum chamber. Under the action of the electric field, the Ar gas is ionized into positive Ions and electrons, a certain negative high voltage is added to the target. The electrons emitted from the target are affected by the magnetic field and the ionization probability of the working gas increases, forming a high-density plasma near the cathode. Ar ions are driven by the Lorentz force. It accelerates towards the target surface and bombards the target surface at a very high speed, so that the sputtered atoms on the target follow the principle of momentum conversion and fly away from the target surface with high kinetic energy to the substrate to deposit a film.

Tungsten Sputtering Target parameters

Applications

Flat panel displays, coated glass industry (mainly including architectural glass, automotive glass, optical thin film glass, etc.), thin film solar energy, surface engineering (decoration & tools), (magnetic, optical) recording media, microelectronics, automotive lights, decorative coatings, etc.

ZhenAn Main products:

1. Molybdenum products:

1) Pure molybdenum products:

molybdenum powder, slabs, bars, rolling plates, sheets, rods (electrodes), wires, crucibles, boats, funnels and other special shape molybdenum products.

2) Molybdenum alloy products:

MLR plates, MLR rods, TZM plates, wires and other molybdenum alloy products.

2. Tungsten products:

1) Pure tungsten products:

tungsten powder, slabs, bars, rolling plates, sheets, rods (electrodes), wires, crucibles, boats, funnels and other special shapes.

2) Tungsten alloy products:

alloy wires, alloy rods (electrodes), alloy crucibles, and other special shape tungsten alloy.

3. Alloy products:

1) Tungsten-copper alloy, silver-tungsten alloy, molybdenum-copper alloy, molybdenum-tungsten alloy.

2) Tungsten nickel copper alloy and tungsten nickel iron alloy.

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